PYROELECTRIC PROPERTIES OF LEAD ZIRCONIUM TITANATE (PbZr0.525Ti0.475O3) METAL-FERROELECTRIC-METAL CAPACITOR AND ITS APPLICATION FOR IR SENSOR

M. Hikam; Irzaman Irzaman; H. DarmasetiawanArifin; P. Arifin; M. Budiman; M. Barmawi

doi:10.17146/jsmi.2005.6.3.4848

PYROELECTRIC PROPERTIES OF LEAD ZIRCONIUM TITANATE (PbZr0.525Ti0.475O3) METAL-FERROELECTRIC-METAL CAPACITOR AND ITS APPLICATION FOR IR SENSOR

M. Hikam⁽¹⁾, Irzaman Irzaman⁽²⁾, H. DarmasetiawanArifin⁽³⁾, P. Arifin⁽⁴⁾, M. Budiman⁽⁵⁾, M. Barmawi⁽⁶⁾,

(1) Department of Physics, FMIPA - UI Kampus Depok 16424
(2) Department of Physics, FMIPA - IPB Jl. Raya Pajajaran Baranangsiang, Bogor 16143
(3) Department of Physics, FMIPA - IPB Jl. Raya Pajajaran Baranangsiang, Bogor 16143
(4) Department of Physics, FMIPA - ITB Jl. Ganesha 10, Bandung 40132
(5) Department of Physics, FMIPA - ITB Jl. Ganesha 10, Bandung 40132
(6) Department of Physics, FMIPA - ITB Jl. Ganesha 10, Bandung 40132

Corresponding Author

Abstract

PYROELECTRIC PROPERTIES OF LEAD ZIRCONIUM TITANATE (PbZr_0.525Ti_0.475O₃) METAL-FERROELECTRIC-METAL CAPACITOR AND ITS APPLICATION FOR IR SENSOR. Thin films lead zirconium titanate (PbZr_0.525Ti_0.475O₃) prepared on Pt(200)/SiO2/Si(100) substrates using chemical solution deposition (CSD) method for 0.5 M solution have been investigated. The films were grown by spin coating at 2500, 3000, 3500 rpm for 30 seconds, and then annealing at 750^oC for 3 hours. X-ray diffraction (XRD), pyroelectric properties observation were employed to characterize the grown films. The film shows tetragonal structure with lattice constants are a = b = 4.141 Å, c = 3.828 Å. The voltage responsivity (r_v) measured at chopper frequency of 2000 Hz and at wavelength of 947 nm are between 32.7-44.9 μV/W. Meanwhile, the pyroelectric coefficient (p) are in the range of 5.01 x 10_-4-6.88 x 10_-4 C/m²K for PZT thin films. These results show that PZT thin films are suitable for use as a pyroelectric IR sensor.